Light Injection Annealing Furnace

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        Light Injection Annealing Furnace

        By adjusting the Fermi energy level of the cell, controlling the total amount and valence state of H,improving the efficiency of H passivation and defect repair, to reduce the LID effect of P-type cells and improve the conversion efficiency of N-type cells.

        Equipment Name:

        Light Injection Annealing Furnace

        Equipment Model:

        SC-LED05L/RA


        Equipment Application:

        By adjusting the Fermi energy level of the cell, controlling the total amount and valence state of H,improving the efficiency of H passivation and defect repair, to reduce the LID effect of P-type cells and improve the conversion efficiency of N-type cells.


        Process Flow:


        Pre-heating →Light Injection →Cooling



        Features:


        1、Dual-track production line, the rack and electrical parts completely independent without interfering operations of each other.

        2、High throughput: match with the throughput of screen printing process, CT≤0.80s,based on silicon wafer size M10 (18X±0.5mm*18X±0.5mm). 


        Parameters:


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